Evatec Market Segment Photonics

Photonics

Complete solutions for high precision optical layers using Advanced Process Control 

 

From automotive applications to smart mobile devices, Evatec’s evaporation and sputter platforms equipped with Advanced Process Control technology deliver the best cost of ownership for mass production of precision optical layers.  

Whether its Biometric Sensing or Augmented Reality, our production platforms enable the deposition of filters, ARs, DBRs and other high performance coatings including DLC Hard and Antismudge coatings. Evatec processes enhance the performance of the sensors, cameras and  touch screens of our smart devices as well as the dashboards in our cars. 3D and decorative coatings are also brought to the next quality level in performance.

 

THE EVATEC TOOL PORTFOLIO FOR
PHOTONICS

We offer evaporation and sputter technologies on a range of batch, cluster or fully automated inline platforms. 

Our experts are on hand to help you find the right platforms according to your process requirements, throughput and factory integration requirements. Alternatively, click on the photo links to read more about each platform

 

BAK FAMILY  

Evaporators from 0.5 to 2.0 metres with proprietary e gun technologies offering enhanced PIAD processes and flexibility for quick changes of materials, substrate size, shape & curvature.

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MSP 1232  

Batch sputter platform for high throughput production offering useable area of 2.2 square metres per batch of high precision coatings handling a range of substrate sizes up to 560 x 380mm.

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CLUSTERLINE® 200  

Cassette-to-cassette 8 inch cluster to semiconductor industry handling and tracking standards equipped with batch module sputter processing for technologies like wafer level optics.

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SOLARIS®  

Family of inline platforms for ultra high throughput in production of contacts, ITO, AR and antismudge coatings on single substrates or mini batches on carriers in consumer applications. 

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Advanced Process Control

Evatec production platforms integrate a range of closed loop process control techniques for improved precision and yield. 

  • Broadband Optical Monitoring for direct substrate measurement with In situ reoptimisation for real time recipe adjustment during evaporation or sputter deposition
  • Plasma Emission Monitoring for perfect stoichiometry control and higher throughputs in sputter.
  • Optical Pyrometry in evaporation and sputter processes for enhanced temperature control in IR technologies. 
  • Optics Tool Box ensures smooth integration all the way from thin film design through recipe generation and coating execution. Reduce your process development times, and increase your throughput.

Click here to download the brochure on Optical Monitoring to learn more about In situ Reoptimisation, Hybrid mode monitoring ( broadband & monochromatic) and read other case studies illustrating how you can optimise your optical thin film production

 

Wafer Level Optics

Securing the process repeatabilities and low particle levels essential for high yield production in wafer level optics applications  requires fully automated cassette to cassette production technology eliminating all manual handling .  Read more about typical applications including biometric sensing and structured filter coating supported by Evatec on our CLUSTERLINE 200 BPM tool in our dedicated new wafer level optics brochure.  Click here to fill in our contact form and request your copy.

 

 

Smart Glasses

From automotive to avionics and smart device consumer applications,  we support  deposition of the thin films required in a range of Augmented Reality / Mixed Reality ( AR/MR) applications .  The typical layers required including Waveguides, Beam splitters, TCOs, DBRs, and antireflection coatings can be deposited on a range of Evatec platforms according to application, substrate size and throughput. Evatec process know how also supports efficient handling and protection of coatings deposited on polymeric substrates.

 

 

Precision Optics

Evatec’s Advanced Process Control technologies including broadband optical monitoring support evaporation or sputter processes for a wide range of applications in the UV, VIS and  IR . Evaporation on Evatec’s range of  BAK platforms offers a flexible production solution for a wide range of 2.5 and 3D substrate geometries. CLUSTERLINE 200 BPM platforms offer cassette to cassette sputter solutions and use custom cathode technologies for enhanced precision and lower particles. The highly flexible MSP completes Evatec’s mass production portfolio  From edge emitting lasers ( EELS) to fibre optics, our applications team have access to 70+ years of substrate handling and process know how to support precision optics coating applications.

 

 

Functional Coatings 

Enhancing our optical and optoelectronics devices through coatings that change their colour  or protect them in daily use requires coating solutions that deliver volume and process repeatability at the right unit cost .  Inline solutions like SOLARIS  deliver the colour, anti-smudge and anti-scratch coatings needed.

Evatec process capabilities support other applications too, including the manufacture of CsI / TlI based scintillators for high performance digital X-ray detectors in medical applications. Evaporation solutions on Evatec's large area BAK1401 and BAV2000 box coaters with custom source technologies deliver precise stoichiometry and columnar layer structures in the films required in scintillator manufacture for digital X-ray detectors.

 

From automotive applications to smart mobile devices, Evatec’s evaporation and sputter platforms equipped with Advanced Process Control technology deliver the best cost of ownership for mass production of precision optical layers.  

Whether its Biometric Sensing or Augmented Reality, our production platforms enable the deposition of filters, ARs, DBRs and other high performance coatings including DLC Hard and Antismudge coatings. Evatec processes enhance the performance of the sensors, cameras and  touch screens of our smart devices as well as the dashboards in our cars. 3D and decorative coatings are also brought to the next quality level in performance.

 

THE EVATEC TOOL PORTFOLIO FOR
PHOTONICS

We offer evaporation and sputter technologies on a range of batch, cluster or fully automated inline platforms. 

Our experts are on hand to help you find the right platforms according to your process requirements, throughput and factory integration requirements. Alternatively, click on the photo links to read more about each platform

 

Advanced Process Control

Evatec production platforms integrate a range of closed loop process control techniques for improved precision and yield. 

  • Broadband Optical Monitoring for direct substrate measurement with In situ reoptimisation for real time recipe adjustment during evaporation or sputter deposition
  • Plasma Emission Monitoring for perfect stoichiometry control and higher throughputs in sputter.
  • Optical Pyrometry in evaporation and sputter processes for enhanced temperature control in IR technologies. 
  • Optics Tool Box ensures smooth integration all the way from thin film design through recipe generation and coating execution. Reduce your process development times, and increase your throughput.

Click here to download the brochure on Optical Monitoring to learn more about In situ Reoptimisation, Hybrid mode monitoring ( broadband & monochromatic) and read other case studies illustrating how you can optimise your optical thin film production

 

Wafer Level Optics

Securing the process repeatabilities and low particle levels essential for high yield production in wafer level optics applications  requires fully automated cassette to cassette production technology eliminating all manual handling .  Read more about typical applications including biometric sensing and structured filter coating supported by Evatec on our CLUSTERLINE 200 BPM tool in our dedicated new wafer level optics brochure.  Click here to fill in our contact form and request your copy.

 

 

Smart Glasses

From automotive to avionics and smart device consumer applications,  we support  deposition of the thin films required in a range of Augmented Reality / Mixed Reality ( AR/MR) applications .  The typical layers required including Waveguides, Beam splitters, TCOs, DBRs, and antireflection coatings can be deposited on a range of Evatec platforms according to application, substrate size and throughput. Evatec process know how also supports efficient handling and protection of coatings deposited on polymeric substrates.

 

 

Precision Optics

Evatec’s Advanced Process Control technologies including broadband optical monitoring support evaporation or sputter processes for a wide range of applications in the UV, VIS and  IR . Evaporation on Evatec’s range of  BAK platforms offers a flexible production solution for a wide range of 2.5 and 3D substrate geometries. CLUSTERLINE 200 BPM platforms offer cassette to cassette sputter solutions and use custom cathode technologies for enhanced precision and lower particles. The highly flexible MSP completes Evatec’s mass production portfolio  From edge emitting lasers ( EELS) to fibre optics, our applications team have access to 70+ years of substrate handling and process know how to support precision optics coating applications.

 

 

Functional Coatings 

Enhancing our optical and optoelectronics devices through coatings that change their colour  or protect them in daily use requires coating solutions that deliver volume and process repeatability at the right unit cost .  Inline solutions like SOLARIS  deliver the colour, anti-smudge and anti-scratch coatings needed.

Evatec process capabilities support other applications too, including the manufacture of CsI / TlI based scintillators for high performance digital X-ray detectors in medical applications. Evaporation solutions on Evatec's large area BAK1401 and BAV2000 box coaters with custom source technologies deliver precise stoichiometry and columnar layer structures in the films required in scintillator manufacture for digital X-ray detectors.

 

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