PHOTONICS

Complete solutions for high precision optical layers using Advanced Process Control 

 

From automotive applications to smart mobile devices, Evatec’s evaporation and sputter platforms equipped with Advanced Process Control technology deliver the best cost of ownership for mass production of precision optical layers.  

Whether its 3D Imaging and Face Recognition, or Augmented Reality, our production platforms enable the deposition of filters, ARs, DBRs and other high performance coatings including DLC Hard and Antismudge coatings. Evatec processes enhance the performance of the sensors, cameras and the touch screens of our smart devices, the combiners in Head Up Displays (HUD) for our cars and provide the right lighting conditions in our operating theatres. 

Evatec process capabilities support other applications too, including the manufacture of CsI / TlI based scintillators for high performance digital X-ray detectors in medical applications. Evaporation solutions on Evatec's large area BAK1401 and BAV2000 box coaters with custom source technologies deliver precise stoichiometry and columnar layer structures in the films required in scintillator manufacture for digital X-ray detectors.

THE EVATEC TOOL PORTFOLIO FOR
PHOTONICS

We offer evaporation and sputter technologies on a range of batch, cluster or fully automated inline platforms. 

Our experts are on hand to help you find the right platforms according to your process requirements, throughput and factory integration requirements. Alternatively, click on the photo links to read more about each platform

 

BAK FAMILY  

Evaporators from 0.5 to 2.0 metres with proprietary e gun technologies offering enhanced PIAD processes and flexibility for quick changes of materials, substrate size, shape & curvature.

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MSP 1232  

Batch sputter platform for high throughput production offering useable area of 2.2 square metres per batch of high precision coatings handling a range of substrate sizes up to 560 x 380mm.

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CLUSTERLINE® 200  

Cassette-to-cassette 8 inch cluster to semiconductor industry handling and tracking standards equipped with batch module sputter processing for technologies like wafer level optics.

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SOLARIS®  

Family of inline platforms for ultra high throughput in production of contacts, ITO, AR and antismudge coatings on single substrates or mini batches on carriers in consumer applications. 

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Advanced Process Control

Evatec production platforms integrate a range of closed loop process control techniques for improved precision and yield. 

  • Broadband Optical Monitoring for direct substrate measurement with In-situ reoptimization for real time recipe adjustment during evaporation or sputter deposition
  • Plasma Emission Monitoring for perfect stoichiometry control and higher throughputs in sputter.
  • Optical Pyrometry in evaporation and sputter processes for enhanced temperature control in IR technologies. 
  • Optics Tool Box ensures smooth integration all the way from thin film design through recipe generation and coating execution. Reduce your process development times, and increase your throughput.

 

Click here to download the brochure on APC for Optical Thin Films

 

From automotive applications to smart mobile devices, Evatec’s evaporation and sputter platforms equipped with Advanced Process Control technology deliver the best cost of ownership for mass production of precision optical layers.  

Whether its 3D Imaging and Face Recognition, or Augmented Reality, our production platforms enable the deposition of filters, ARs, DBRs and other high performance coatings including DLC Hard and Antismudge coatings. Evatec processes enhance the performance of the sensors, cameras and the touch screens of our smart devices, the combiners in Head Up Displays (HUD) for our cars and provide the right lighting conditions in our operating theatres. 

Evatec process capabilities support other applications too, including the manufacture of CsI / TlI based scintillators for high performance digital X-ray detectors in medical applications. Evaporation solutions on Evatec's large area BAK1401 and BAV2000 box coaters with custom source technologies deliver precise stoichiometry and columnar layer structures in the films required in scintillator manufacture for digital X-ray detectors.

THE EVATEC TOOL PORTFOLIO FOR
PHOTONICS

We offer evaporation and sputter technologies on a range of batch, cluster or fully automated inline platforms. 

Our experts are on hand to help you find the right platforms according to your process requirements, throughput and factory integration requirements. Alternatively, click on the photo links to read more about each platform

 

Advanced Process Control

Evatec production platforms integrate a range of closed loop process control techniques for improved precision and yield. 

  • Broadband Optical Monitoring for direct substrate measurement with In-situ reoptimization for real time recipe adjustment during evaporation or sputter deposition
  • Plasma Emission Monitoring for perfect stoichiometry control and higher throughputs in sputter.
  • Optical Pyrometry in evaporation and sputter processes for enhanced temperature control in IR technologies. 
  • Optics Tool Box ensures smooth integration all the way from thin film design through recipe generation and coating execution. Reduce your process development times, and increase your throughput.

 

Click here to download the brochure on APC for Optical Thin Films

 

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