SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.
The S151 is a work horse for cost efficient high volume production for selected applications in Power Devices, Photovoltaics and Photonics using RTP, PVD, etch or CVD technologies. Its proven carrier system guarantees secure high speed handling for substrates up to 8 inch diagonal.
The S380 is optimized for high volume production of larger flexible or rigid substrates by RTP, PVD, Etch or CVD technologies. It's proven carrier system guarantees secure high speed handling for substrates up to 15 inch diagonal.