Evatec SOLARIS S380


Inline production platforms




SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.