HEXAGON

You advantage in Advanced Packaging

System design for the lowest Rc in the industry

HEXAGON is a dedicated wafer level packaging platform for volume production in applications like FOWLP at the lowest cost of ownership offering atmospheric pressure degas, etch and metal deposition.

  • Processing of highly outgassing organic passivated wafers
  • Atmospheric frontend handling with a high-performance dual end effector robot for the shortest wafer swap times
  • Wafer transfer by synchronous indexer enables high speed wafer processing
  • Etch shield kit lifetimes of > 20000 wafers with enhanced uptime and reduced maintenance
  • Footprint less than 11 square metres (without control racks)
  • System design for lowest Rc in the industry and best wafer to wafer repeatability

 

It's all about throughput

Wafer transfer by synchronous indexer enables high speed wafer processing. Wafer handling enables full face etch and deposition processes with in chamber wafer sensing for accurate, repeatable positioning time after time in 24/7 production. Reducing maintenance time is at the heart of HEXAGON’s design with a reliable transport system and powered source handling for rapid, easy access by a single operator.

  • Install up to five process chambers for etch, cool or deposition
  • Atmospheric batch degasser
  • Bridge capability with simple conversion between 200mm and 300mm

Process Chambers

  • Arctic Cooling Module for precise process temperature control
  • Arctic ICP soft etch module with highest kit life
  • Optional Insitu pasting
  • ARQ310 DC or pulsed DC sputter source with uniformity compensation over target life
  • Long life targets with best utilization
  • Dedicated degasser options for all wafer level packaging (WLP) processes
  • Chuck RF Bias with auto matching option
  • Controlled chuck temperature
  • Chuck options for mechanical clamping, clampless chuck with shadow mask
  • Drop-in shield kits for rapid exchange

Proven process capabilities come as standard when you choose HEXAGON 

To read more about typical application examples and Evatec know-how in Advanced Packaging download the HEXAGON brochure , view Evatec's LAYERS magazine or visit the news section of our web site.

 

System design for the lowest Rc in the industry

HEXAGON is a dedicated wafer level packaging platform for volume production in applications like FOWLP at the lowest cost of ownership offering atmospheric pressure degas, etch and metal deposition.

  • Processing of highly outgassing organic passivated wafers
  • Atmospheric frontend handling with a high-performance dual end effector robot for the shortest wafer swap times
  • Wafer transfer by synchronous indexer enables high speed wafer processing
  • Etch shield kit lifetimes of > 20000 wafers with enhanced uptime and reduced maintenance
  • Footprint less than 11 square metres (without control racks)
  • System design for lowest Rc in the industry and best wafer to wafer repeatability

 

It's all about throughput

Wafer transfer by synchronous indexer enables high speed wafer processing. Wafer handling enables full face etch and deposition processes with in chamber wafer sensing for accurate, repeatable positioning time after time in 24/7 production. Reducing maintenance time is at the heart of HEXAGON’s design with a reliable transport system and powered source handling for rapid, easy access by a single operator.

  • Install up to five process chambers for etch, cool or deposition
  • Atmospheric batch degasser
  • Bridge capability with simple conversion between 200mm and 300mm

Process Chambers

  • Arctic Cooling Module for precise process temperature control
  • Arctic ICP soft etch module with highest kit life
  • Optional Insitu pasting
  • ARQ310 DC or pulsed DC sputter source with uniformity compensation over target life
  • Long life targets with best utilization
  • Dedicated degasser options for all wafer level packaging (WLP) processes
  • Chuck RF Bias with auto matching option
  • Controlled chuck temperature
  • Chuck options for mechanical clamping, clampless chuck with shadow mask
  • Drop-in shield kits for rapid exchange

Proven process capabilities come as standard when you choose HEXAGON 

To read more about typical application examples and Evatec know-how in Advanced Packaging download the HEXAGON brochure , view Evatec's LAYERS magazine or visit the news section of our web site.

 

HEXAGON - in the news