Evatec's MSP is the platform of choice when it comes to batch production of high precision optical layers at high volume at the lowest production costs. Enjoy a leap in profitability for the latest version incorporating new capabilities and features.

  • A leap in capacity per batch (up to 2.2m^2) and maximum substrate sizes up to 560 x 380mm
  • A leap in performance of your coatings - even better environmental stability and reproducibility
  • A greater choice of process options than ever with an integrated plasma source for enhanced layer quality, substrate precleaning and optimized adhesion on plastics
  • According to application we offer custom tooling solutions such as automated handling and substrate flipping

 

The MSP offers flexibility with simple, fast switch between process and substrate sizes even in mass production. 

  • Substrate sizes up to 560 x 380mm with excellent uniformity
  • Up to 2.2m^2 coated area per batch
  • Up to 6 sputter cathodes enabling different materials or enhanced throughput
  • Integrated plasma source for enhanced layer quality and for substrate precleaning
  • Rapid exchange of tooling for different substrate sizes
  • High target utilization without compromise on coating specification
  • Simple target exchange and easy access for system maintenance
  • In-situ advanced process control techniques such as "Plasma Emission Monitoring" combined with "Broadband Optical Monitoring" provide high coating rates and superior optical performance.

The MSP1232 vertical sputter platform is configured for manual loading of segments and offers up to 2.2m2 of usable coating area per batch (e.g up to 48 substrates each of 136 x 270mm)

From Head Up Display (HUD) to Satellite Communications Technology the new MSP 1232 supports high precision optical coatings on flat and 3D-shaped substrates made of glass, plastic or metal. 

  • Dielectric oxide and nitride coatings (Ta2O5, Nb2O5, SiO2, Al2O3, TiO2, SiN, SiON)
  • Transparent conductive oxide (ITO)
  • Metals (Ta, Ti, Al, Cr, Cu)
  • Decorative coatings (CrN, CrON, )
  • Semiconductor (a-Si, Si)
  • Anti-smudge

 

To read more about typical application examples download the brochure or visit the news section of our web site.

 

Evatec's MSP is the platform of choice when it comes to batch production of high precision optical layers at high volume at the lowest production costs. Enjoy a leap in profitability for the latest version incorporating new capabilities and features.

  • A leap in capacity per batch (up to 2.2m^2) and maximum substrate sizes up to 560 x 380mm
  • A leap in performance of your coatings - even better environmental stability and reproducibility
  • A greater choice of process options than ever with an integrated plasma source for enhanced layer quality, substrate precleaning and optimized adhesion on plastics
  • According to application we offer custom tooling solutions such as automated handling and substrate flipping

 

The MSP offers flexibility with simple, fast switch between process and substrate sizes even in mass production. 

  • Substrate sizes up to 560 x 380mm with excellent uniformity
  • Up to 2.2m^2 coated area per batch
  • Up to 6 sputter cathodes enabling different materials or enhanced throughput
  • Integrated plasma source for enhanced layer quality and for substrate precleaning
  • Rapid exchange of tooling for different substrate sizes
  • High target utilization without compromise on coating specification
  • Simple target exchange and easy access for system maintenance
  • In-situ advanced process control techniques such as "Plasma Emission Monitoring" combined with "Broadband Optical Monitoring" provide high coating rates and superior optical performance.

The MSP1232 vertical sputter platform is configured for manual loading of segments and offers up to 2.2m2 of usable coating area per batch (e.g up to 48 substrates each of 136 x 270mm)

From Head Up Display (HUD) to Satellite Communications Technology the new MSP 1232 supports high precision optical coatings on flat and 3D-shaped substrates made of glass, plastic or metal. 

  • Dielectric oxide and nitride coatings (Ta2O5, Nb2O5, SiO2, Al2O3, TiO2, SiN, SiON)
  • Transparent conductive oxide (ITO)
  • Metals (Ta, Ti, Al, Cr, Cu)
  • Decorative coatings (CrN, CrON, )
  • Semiconductor (a-Si, Si)
  • Anti-smudge

 

To read more about typical application examples download the brochure or visit the news section of our web site.