CUSTOM SOLUTIONS

Benefit from over 50 years of evaporation know-how

 

Do you need a special chamber size, a special source or a tooling solution or a system suitable for R&D?

Custom build in a nutshell

  • Access our design and mechanical engineering teams to design a custom chamber configuration
  • Develop new sources and process control techniques through our applications specialists
  • Configure a research tool for your University or Industrial Research Institute

 

The only limit is your imagination

  • With a host of options for special geometries, source designs and process control techniques we hope you will find something within our standard portfolio to meet your needs, but with over 2000 systems delivered around the globe, we have access to a whole history of custom mechanical engineering solutions and special source designs. We can put together a custom BAK design that’s just right for you. The BAK UNI is just one example of an Evatec system focused specifically on the needs of Universities and Industrial Research Institutes.

Contact us to ask about our approach to custom build and find out more about BAK UNI capabilities and options.

BAKs can be delivered with a choice of assisted loading options that fit your throughput, handling and substrate tracking needs.

Single wafer / carrier transfer

Ideal for smaller size systems with limited substrate capacity, this front side transfer system means the process chamber can be kept under vacuum ready for coating once each position in the carrier is loaded. Access to the chamber for maintenance or source replenishment is via the grey room.

Assisted calotte load / unload ("Lazy Susan")

The preloaded calotte is transferred through the standard front door at atmosphere. Available across a wide range of system sizes, this system is ideal where loading heights make manual handling more difficult or loaded carriers are heavy to BAK in atmosphere. A second load / unload station can be integrated to reduce overall handling times.

Casette-to-cassette (" BAK Autoload")

For wafer sizes up to 8 inch, BAK Autoload completely eliminates manual handling of wafers saving time, eliminating operator errors and reducing costs. BAK Autoload takes care of all necessary steps including wafer alignment for flat or notch, preloading the domes and complete dome exchange through a side port in the coater. Precise control of robot and handling environment avoids potential sources of damage or contamination. Each and every wafer can be tracked through the coating process by position sand dummy or metrology wafers can be included automatically in the loading process.

Cassette-to-cassette with load lock ("BAK Autoload Loadlock")

Just as the standard Autoload version, a robot system handles all operations but an additional intermediate load lock chamber system means the process chamber can be kept under vacuum, shortens cycle times and increases throughput.

View the online data sheet for BAK Autoload below or download the complete BAK Family brochure below to read more about the capabilities of the BAK Family.

The “BAK” name may be 50 years old but with the choice of more deposition and control technologies than ever before, there’s never been a better time to bring your existing BAK up to the latest standards to achieve new levels of process control and yield in deposition of metals, oxides, TCOs and compounds.

WHY RETROFIT

  • Enable new complex processes
  • Improved process yields
  • Increase uptime
  • Track your processes – data logging & QA
  • Replace obsolescent parts

ENHANCING COATER PERFORMANCE

Achieve new levels of coater performance through upgrades. To find out more about retrofit possibilities on your existing BAK click here to download the brochure

Do you need a special chamber size, a special source or a tooling solution or a system suitable for R&D?

Custom build in a nutshell

  • Access our design and mechanical engineering teams to design a custom chamber configuration
  • Develop new sources and process control techniques through our applications specialists
  • Configure a research tool for your University or Industrial Research Institute

 

The only limit is your imagination

  • With a host of options for special geometries, source designs and process control techniques we hope you will find something within our standard portfolio to meet your needs, but with over 2000 systems delivered around the globe, we have access to a whole history of custom mechanical engineering solutions and special source designs. We can put together a custom BAK design that’s just right for you. The BAK UNI is just one example of an Evatec system focused specifically on the needs of Universities and Industrial Research Institutes.

Contact us to ask about our approach to custom build and find out more about BAK UNI capabilities and options.

BAKs can be delivered with a choice of assisted loading options that fit your throughput, handling and substrate tracking needs.

Single wafer / carrier transfer

Ideal for smaller size systems with limited substrate capacity, this front side transfer system means the process chamber can be kept under vacuum ready for coating once each position in the carrier is loaded. Access to the chamber for maintenance or source replenishment is via the grey room.

Assisted calotte load / unload ("Lazy Susan")

The preloaded calotte is transferred through the standard front door at atmosphere. Available across a wide range of system sizes, this system is ideal where loading heights make manual handling more difficult or loaded carriers are heavy to BAK in atmosphere. A second load / unload station can be integrated to reduce overall handling times.

Casette-to-cassette (" BAK Autoload")

For wafer sizes up to 8 inch, BAK Autoload completely eliminates manual handling of wafers saving time, eliminating operator errors and reducing costs. BAK Autoload takes care of all necessary steps including wafer alignment for flat or notch, preloading the domes and complete dome exchange through a side port in the coater. Precise control of robot and handling environment avoids potential sources of damage or contamination. Each and every wafer can be tracked through the coating process by position sand dummy or metrology wafers can be included automatically in the loading process.

Cassette-to-cassette with load lock ("BAK Autoload Loadlock")

Just as the standard Autoload version, a robot system handles all operations but an additional intermediate load lock chamber system means the process chamber can be kept under vacuum, shortens cycle times and increases throughput.

View the online data sheet for BAK Autoload below or download the complete BAK Family brochure below to read more about the capabilities of the BAK Family.

The “BAK” name may be 50 years old but with the choice of more deposition and control technologies than ever before, there’s never been a better time to bring your existing BAK up to the latest standards to achieve new levels of process control and yield in deposition of metals, oxides, TCOs and compounds.

WHY RETROFIT

  • Enable new complex processes
  • Improved process yields
  • Increase uptime
  • Track your processes – data logging & QA
  • Replace obsolescent parts

ENHANCING COATER PERFORMANCE

Achieve new levels of coater performance through upgrades. To find out more about retrofit possibilities on your existing BAK click here to download the brochure