LAYERS 9 – Powering the SiC Future in China
Silicon Carbide (SiC) MOSFETs are playing a key role in next generation power electronics, driven by demand from electric vehicles, renewable energy systems, and industrial applications. Their ability to operate at higher voltages, temperatures, and switching speeds places increasing demands on metallization processes, particularly as manufacturers scale up production and transition to larger wafer formats.
Evatec addresses these requirements with its CLUSTERLINE® 200 and CLUSTERLINE® 300 platforms, which are designed to support advanced metallization flows for SiC power devices. The modular Single Process Module architecture allows multiple process steps to be combined within one platform, including etch, titanium, nickel or nickel vanadium, silver, and aluminum copper deposition. This flexibility enables different metallization schemes such as backside metallization, solderable top metallization, silicide formation, and frontside metallization to be implemented on a single tool.
For backside metallization in particular, careful wafer handling is essential due to the thickness and brittleness of SiC substrates. CLUSTERLINE® platforms feature dedicated chuck concepts that enable scratch free processing while maintaining stable thermal and mechanical conditions. Integrated pre treatment, deposition, cooling, and automation modules further support consistent process performance and high throughput.
The platforms also deliver strong productivity and cost of ownership advantages. Cassette to cassette automation, low contamination levels, and reduced maintenance requirements help ensure stable operation in high volume manufacturing environments. For emerging eight inch SiC production, throughput of up to 35 wafers per hour can be achieved.
To support process development and risk reduction, Evatec complements its hardware with simulation capabilities that allow customers to model wafer temperature behavior and process conditions in advance. Combined with local service and support in key SiC manufacturing regions, CLUSTERLINE® platforms provide a robust foundation for scaling SiC power device production.
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