From Touch Panels to EMI Shielding, Power Devices to Photovoltaics, SOLARIS® platforms are designed for "fully automated fabs". Choose from the S151 configured for substrates up to 8 inch diagonal or the S380 for substrates up to 15 inch diagonal.
Find out moreFrom wafer level optics to 3D coatings, and from precision optics to decorative and functional coatings, read more about Evatec production solutions using Advanced Process Control (APC) technologies for the best repeatability and yield.
Find out moreFind out how Evatec's evaporation and sputter technology know-how can help you increase your yields and drive down your costs.
Find out moreFrom modification of sensitive coatings to high rate layer removal, read more about Evatec plasma source technology covering applications at wafer or panel level.
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Find out moreThe S151 is a work horse for cost efficient high volume production for selected applications in Power Devices, Photovoltaics and Photonics using RTP, PVD, etch or CVD technologies. Its proven carrier system guarantees secure high speed handling for substrates up to 8 inch diagonal.
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The S380 is optimized for high volume production of larger flexible or rigid substrates by RTP, PVD, Etch or CVD technologies. It's proven carrier system guarantees secure high speed handling for substrates up to 15 inch diagonal.
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