LAYERS 9 – PZT a long history and an exciting future
Physical vapor deposition of lead zirconium titanate, commonly known as PZT, has been an integral part of the MEMS industry for more than 15 years. Since delivering its first tools and establishing early industry collaborations, Evatec has continuously supported customers in industrializing PZT processes for a growing range of applications. Today, rising demand from areas such as micro speakers, micro mirrors and air cooling systems is giving PZT renewed momentum.
PZT deposition is a complex manufacturing sequence that involves more than the functional layer itself. Multiple layers are required to enable correct crystal growth and electrical performance, including adhesion and diffusion barrier layers, a platinum electrode and an oriented seed layer. Only with precise control of this full layer stack can the perovskite crystal structure and desired film orientation be achieved. For 200 mm wafers, process requirements typically include high polarization and strong piezoelectric response, combined with low wafer stress, low leakage current, low dielectric loss and high fatigue resistance.
To address these demands, Evatec offers a dedicated PZT process kit featuring carefully selected ceramic targets with controlled dopant levels, RF sources for large target diameters and optimized hardware designs. A dedicated magnet configuration and advanced RF shielding, combined with a Very Hot Chuck concept, enable stable daily production at temperatures exceeding 500 degrees Celsius. An integrated matching unit with autotuning allows fine adjustment of film properties during processing.
The CLUSTERLINE® 200 platform serves as the basis for PZT production and can be configured according to throughput requirements. For high volume manufacturing, dedicated single process modules are used, with optional additional PZT modules for increased capacity. For development work or lower volume production, more compact configurations using Multi Source technology offer flexibility and a clear upgrade path. In parallel, Evatec continues to work with partners on further process optimization to support future PZT applications.
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