LAYERS 9 – Optical Monitoring
Evatec’s GSM broadband optical monitoring system has supported high‑precision optical thin film deposition for more than a decade. With the introduction of the new GSM 1102 featuring a Near Infrared (NIR) extension, users now benefit from an extended monitoring wavelength range of 380 to 1700 nm, significantly increasing capability in the near‑infrared spectrum.
The latest GSM generation maintains the flexibility of its predecessor while integrating major hardware enhancements. These include a second spectrometer equipped with an InGaAs detector, dedicated light‑splitting hardware, and upgraded firm‑ and hardware for fast and seamless data acquisition. Users can continue to choose between broadband, monochromatic, or hybrid monitoring modes and benefit from in‑process reoptimization for dynamic tuning during deposition.
The system supports multiple Evatec platforms such as BAK evaporation systems, CLUSTERLINE® 200 BPM, CLUSTERLINE® 200 PECVD, and SOLARIS®, with options for direct monitoring on the substrate or the use of test glass changers.
Case studies performed on a CLUSTERLINE® 200 BPM illustrate the advantages of the expanded wavelength range. During sputter deposition processes, the GSM measured the full reflection spectrum from 380 to 1700 nm at every rotation of the turntable, providing stable, noise‑free data in close agreement with simulated spectra.
The extended NIR coverage enables accurate, real‑time control of thin film growth for a wide range of optical components used in the near‑infrared. By capturing the complete spectrum across a much broader wavelength span, the GSM 1102 significantly enhances process reliability, uniformity, and reproducibility in production.
Importantly, the NIR extension is available not only for new equipment but also as a retrofit package for existing GSM 1102 systems, allowing users to upgrade their monitoring capabilities without replacing their tools.
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