LAYERS 5 - LOW LOSS CMOS

Silicon photonics (SiP), where photons replace electrons as the carrier medium for information, is a combination of two most important inventions of the 20th century, namely the silicon integrated circuit (IC) and the semiconductor laser. Evatec’s Process Engineer Andreas Frigg explains how reactive sputtering on CLUSTERLINE 200 is a promising new process for cost-effective deposition of SiN for applications like waveguides enabling the rapid growth of data centers.

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