LAYERS 5 - EVATEC YOUR PARTNER IN MICRO LED

The layer types may be the same, but the demands are different for the new emerging micro LED technology when compared with conventional LED production. Stefan Seifried, Head of Business Unit Optoelectronics summarizes the current state of play.

Delivering proven solutions

After long years of experience in the LED field, two different configurations of the CLUSTERLINE® 200 product have already been qualified for our customers’ value chain in the field of micro LED. The first platform equipped with a Batch Process Module (BPM) is a well known “LED workhorse” implemented new and improved features for Micro LED. The second is a variant equipped with Single Process Modules (SPM) with a
pedigree second to none in the semiconductor industry. Both toolsets offer production capabilities for metals, TCO, DBR and passivation layer deposition and are approved by at least five major customers for micro LED products.

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