Delivering proven solutions
After long years of experience in the LED field, two different configurations of the CLUSTERLINE® 200 product have already been qualified for our customers’ value chain in the field of micro LED. The first platform equipped with a Batch Process Module (BPM) is a well known “LED workhorse” implemented new and improved features for Micro LED. The second is a variant equipped with Single Process Modules (SPM) with a
pedigree second to none in the semiconductor industry. Both toolsets offer production capabilities for metals, TCO, DBR and passivation layer deposition and are approved by at least five major customers for micro LED products.
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