Compact design and flexibility make this vertical batch sputter tool for metals, dielectrics and magnetic films a cost effective choice for substrate sizes up to 200 x 230 mm.
Find out moreSenior scientist Dr. Claudiu Valentin Falub explains how the LLS EVO II allows engineering of superior soft magnetic multilayers.
Learn more about Evatec technologies for metals, dielectrics and Advanced Functional Materials (Magnetics and Piezoelectrics) used in RF-MEMS, Sensors, Actuators, TFH and Soft-Magnetics in IVRs.
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