SOLARIS® Family
Inline production platforms
Leading the way in ultra-high volume applications including consumer electronics
Fully Automated Fabs
- Unique “indexing” system for high speed transport
- Flexible tooling systems according to substrate & application
Choice of platforms sizes
- S151 – up to 8 inch diagonal
- S380 – up to 15 inch diagonal
Take the lead in high speed
- Proven Evatec handling know-how
- Proven process know how – metals, dielectrics and TCOs
SOLARIS® Family
SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling.
SOLARIS® platforms are the perfect choice for depositional dielectrics, metals, metal oxides and TCOs when high speed processing and throughput are a must. From multilayer decorative and hard coatings for smart devices to metallization in power devices, SOLARIS® platforms offer flexible high speed manufacturing solutions for photonics, optoelectronics and semiconductor.
Leveraging Evatec engineering know how SOLARIS® platforms can also be equipped with proprietary cathode and substate handling technologies enabling coating on 3D and stepped structures.
There are two platform sizes to choose from:
- The S151 for substrates up to 8 inch diagonal
- The S380 for substates up to 15 inch diagonal
Go straight to SOLARIS® product brochure
SOLARIS® S151
Choose SOLARIS® S151 for:
- Unique "synchronous indexer" technology providing parallel carrier transfer around SOLARIS® for high speed processing
- Configuration with up to 6 process stations for RTP, PVD, etch or CVD
- handling substates up to 8 inch diagonal or "mini batch" processing using carriers
- handling of rigid or flexible substrates
- front end integration in "fully automated fabs"
SOLARIS® S380
Choose SOLARIS® S380 for :
- Unique "synchronous indexer" technology providing parallel carrier transfer around SOLARIS for high speed processing
- Configuration with up to 5 process stations for RTP, PVD, etch or CVD
- substates up to 15 inch diagonal or "mini batch" processing using carriers
- handling of rigid or flexible substrates
- front end integration in "fully automated fabs"
Read more about SOLARIS® Family in our LAYERS magazine
SOLARIS® – Increasing Throughput for Thick Aluminum Layers
Evatec’s SOLARIS® platform delivers high-speed, cassette-to-cassette processing for thick Al films up to 18 µm, achieving throughput gains of up to 60 wafers per hour while ensuring uniformity and reliability for power device applications.
A dose of the hard stuff is just what you need
Today's smart devices offer us more capability than ever, but we expect them to be more robust than ever too. Learn about the new hard coating solutions available to protect them as they taking a pounding in our pockets or lying in the sand.
Buying a new Evatec tool is just the first step in a long term partnership. From initial ramp up support to ongoing maintenance or retrofits adding new capabilities, maximise both uptime and tool working life together with Evatec’s local customer service teams.
- We can help you plan and manage your stocks
- Use our exchange programmes to minimize downtimes
- Our local Field Service Engineers on hand when you need us
- Maximizing output - From Continuous Improvement Programmes (CIP) to new process installations
- Add new capabilities to support your technology roadmaps
- Helping you extend tool working life
- Helping you to help yourself
- Tailored just for you - At Evatec or in your own fab