LLS EVO II
Vertical sputter for metals, dielectrics and magnetic films
Flexible vertical batch sputter tool for metals, dielectrcs and magnetics on substrates up to 230mm
Flexible Design
- Up to 5 sputter sources including co deposition
- Simple exchange between different substrate sizes
Extensive process know-how
- Degas, etch and deposition
- From metals and dielectrics to TCOs & soft magnetics
Production proven
- More than 300 tools around the world
- Customized solutions including front end automation