Silicon Austria Labs enhances thin film technology with new PEALD module

Silicon Austria Labs (SAL) has partnered with Evatec to install a new PEALD (Plasma Enhanced Atomic Layer Deposition) module on the Evatec CLUSTERLINE® 200 tool at its Villach facility. This collaboration enhances SAL’s thin film technology capabilities, enabling advanced low-temperature processing and improved handling of damage-sensitive materials. For more details, please refer to the press release.