LAYERS 8 – Investigating GaN sputter from a liquid Ga target

Dr. Philipp Doering from Fraunhofer Institute for Applied Solid State Physics (IAF) and Thomas Tschirky, Evatec Senior Scientist, discuss their research on sputtering from a liquid Ga-target. They demonstrate the preparation of degenerate n-type GaN thin films with high donor concentrations and low specific resistivities at low process temperatures. The study explores the scattering mechanisms affecting electron mobility and highlights the potential of sputtering for large-scale, low-temperature production of n-type GaN.

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