SilTerra selects Evatec

Evatec’s  CLUSTERLINE^® 200 II tool, operational  in SilTerra’s fab since May 2020, is now deployed for the deposition of piezoelectric thin film for MEMS devices . These devices include SilTerra’s patented Piezoelectric Micromachined Ultrasonic Transducers (PMUT), Surface Acoustic Wave (SAW) resonators, Bulk Acoustic Wave (BAW) resonators and piezoelectric acoustic sensors.

To view the full press release  CLICK HERE